| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier elevator apparatus capable of effectively prevent wafers from dropping out from a carrier. SOLUTION: The carrier elevator apparatus comprises a reference base 9a, carrier reference base 10a movable perpendicularly to the base 9a, drive mechanism 20 to move the carrier reference base 10a perpendicularly, carrier support 3 rotatably mounted on the carrier reference base 10a, tilt stopper 6 to hold the carrier support 3 tilted and horizontal stopper 7 to hold the support 3 horizontally. A carrier 1 is mounted and held inclined on the support 3. The carrier reference base 10a lifts to rotate the carrier support 3 supported with the stopper 6 into a horizontal state. |
