| 摘要 |
PURPOSE:To execute fitting with a high accuracy by providing a supporting body for supporting roughly a mirror by a point in the optical axis direction of laser light, or in the direction orthogonal to the optical axis direction, and making it movable in its direction. CONSTITUTION:A mirror 3 for reflecting laser light 5 which has been generated from a light source 2 is supported by an end face 4a of a supporting body 4, and a copper ball 7 which is attached to the supporting body 4. Also, it is fixed by a rubber pad 9 provided on a holding plate 8 which has been attached to the supporting body 4. Moreover, the supporting body 4 is structured movably in the optical axis direction of the laser light 5 by a long hole 10 and a screw 11 against a table 1. By supporting the mirror 3 by such a constitution, the supporting body 4 is moved in the optical axis direction of the laser light by loosening the screw 11, and the fitting position of the mirror 3 can be adjusted so that the laser light 5 is reflected in a prescribed direction. Also, in case of applying this device when the table 1 is movable in two axial directions of X and Y, the laser light from the optical axis is also made incident from two directions of X and Y axes by using an L-type mirror.
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