| 摘要 |
PROBLEM TO BE SOLVED: To introduce a wafer cassette into a semiconductor manufacturing device horizontally so as to prevent wafers from rattling when the wafers are introduced, to improve the semiconductor manufacturing device in throughput, to enable the wafer cassette to be easily switched from a horizontal position to a vertical position when wafer detection and alignment of an orientation flat take place and surely held when it is changed in attitude, and to prevent the holder of the wafer cassette from impeding the introduction of the wafer cassette into the manufacturing device. SOLUTION: A cassette 7 introduced from the outside is mounted, horizontally in position, on a cassette mounting pad 5 provided in a freely ratable manner. A cassette support member 8 is fitted to the cassette mounting pad 5 in a freely openable manner and kept on standby at a point below the cassette mounting pad 5 when the cassette 7 is introduced. When the detection of a wafer 11 and alignment of an orientation flat take place, the cassette mounting pad 5 is rotated by an angle of 90 deg. or so to turn the cassette 7 horizontal in attitude, wherein the cassette support member 8 is previously turned to be closed so as to be able to support the cassette 7 changed in attitude. |
