| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate washing apparatus provided with a sensor for detecting the presence of the washing member of a washing tool, and the washing tool preventing the falling-off of the washing member from a grasping part. SOLUTION: In the substrate washing tool equipped with a washing instrument mounting mechanism 20 provided with the washing tool 21 having the washing member coming into contact with the washing a surface of a substrate Wf to be washed and bringing the washing member of the washing instrument 21 into contact with the substrate Wf to be washed held and rotated by a substrate holding and rotating mechanism to wash the substrate Wf to be washed, a washing member sensor (floodlight projector 27a, photodetector 27b) for detecting the washing member of the washing tool 21 in such a state that the washing tool 21 mounted on the washing instrument mounting mechanism 20 is present at a predetermined position is provided.
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