| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for supporting an optical unit by which even a large-sized optical unit can be supported stably while suppressing distortion and to provide an aligner. SOLUTION: A device K for supporting an optical unit PU which constitutes an aligner EX is equipped with a plurality of supporting members 11a to 11c which consist of a rigid body for supporting the optical unit PU, and a flexible tube 12 which is disposed between these supporting members 11a to 11c and supports the portion except the portions which are supported by the supporting members 11a to 11c among the optical unit PU. Air is filled into a space 12a formed in the inside of the tube 12. Since the optical unit PU is supported stably without being distorted and in high installation precision with the supporting device K, the exposure precision of aligner EX is improved.
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