| 摘要 |
PURPOSE:To stick very accurately and easily a chip of an acceleration sensor with high parallelism and squareness against a pedestal. CONSTITUTION:A pedstal 3 is provided on the base 2 of a package base plate 1. A concave portion 3d having breadth-directional stoppers 3a, 3b and a depth- directional stopper 3c on a binding face of the pedestal 3 is formed, and the acceleration sensor chip 6 is made in the state to mount the the concave portion 3d and regulate the position to stick thereon. |
