| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming embrittled regions which enables formation of embrittled regions in a multilayer structure so that proper division can be made, even in a region where embrittled regions intersect. SOLUTION: The method of forming embrittled regions comprises performing a first process of forming an embrittled region for n=1, in which an embrittled region 51 is formed as a lowest layer L1-1 (a); performing a second process of forming an embrittled region for n=2, in which an embrittled region 51 is formed as a lowest layer L2-1 and a second layer L2-2 (b); performing a first process of forming an embrittled region for n=2, in which the embrittled region 51 is formed as a second layer L1-2 and a third layer L1-3 (c); thereafter, alternately performing the second process of forming an embrittled region and the first process of forming an embrittled region each for n=2 (d), (e); and finally, performing the second process of forming an embrittled region for n=1, in which the embrittled region 51 is formed as an uppermost layer L2-5 (f). These processes are prescribed, such that the length L of an unprocessed region 52 will fall within a range where the unprocessed region 52 will not block the division. COPYRIGHT: (C)2008,JPO&INPIT |
