发明名称 Heat-Resistant Photosensitive Resin Composition, Method For Forming Pattern Using the Composition, and Electronic Part
摘要 A heat resistant photosensitive resin composition having excellent film properties is provided by constituting a photosensitive resin composition containing (A) a polymer having an acid functional group and/or a substituent derived therefrom, (B) a compound having at least one substituent derived from an amine functional group, (C) a photoreactive compound, and (D) a solvent. Using this composition, a pattern with high resolution can be produced, and thus an electronic part having a high quality can be produced.
申请公布号 US2008233513(A1) 申请公布日期 2008.09.25
申请号 US20040594548 申请日期 2004.03.31
申请人 KOMATSU HIROSHI;FUJIEDA NAGATOSHI;NAKANO HAJIME 发明人 KOMATSU HIROSHI;FUJIEDA NAGATOSHI;NAKANO HAJIME
分类号 G03F7/004;C08G73/10;C08G73/22;G03F7/023;G03F7/037;G03F7/038;G03F7/26 主分类号 G03F7/004
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