CRYSTAL LAMINATE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a crystal laminate structure having a β-GaO-based single crystal film containing in the whole crystal, a dopant whose concentration can be set in a wide range.SOLUTION: There is provided a crystal laminate structure 1 containing as one embodiment: a GaO-based substrate 10; and a β-GaO-based single crystal film 12 containing Cl and a dopant having a concentration of 1×10atoms/cmor higher and 5.0×10atoms/cmor lower and doped concurrently with crystal growth, and formed by epitaxial crystal growth on the principal surface 11 of the GaO-based substrate 10.SELECTED DRAWING: Figure 1