发明名称 METHOD AND APPARATUS FOR FORMING DIFFUSION JUNCTIONS IN SOLAR CELL SUBSTRATES
摘要 <p>Silicon solar cells are made by subjecting substrates to a diffusion junction-forming process wherein a liquid source material containing a selected dopant is sprayed onto one side of the substrates, and thereafter the substrates are fired in an oxygen-containing environment under conditions calculated to cause the dopant to diffuse into the substrates so as to form a shallow p-n junction in each substrate.</p>
申请公布号 EP0506926(B1) 申请公布日期 1997.03.19
申请号 EP19910918988 申请日期 1991.09.20
申请人 ASE AMERICAS, INC. 发明人 ROSENBLUM, MARK, D.;HANOKA, JACK, I.
分类号 H01L21/225;H01L31/04;H01L31/068;H01L31/18;(IPC1-7):H01L21/225;B05B7/00 主分类号 H01L21/225
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