发明名称
摘要 A method of fabricating CMOS devices with local interconnects is disclosed which is performed in two stages. In the first stage, a SALICIDE process is carried out, and in the second stage, the local interconnects are formed.
申请公布号 JP3249524(B2) 申请公布日期 2002.01.21
申请号 JP19940501111 申请日期 1993.06.09
申请人 发明人
分类号 H01L21/768;H01L21/8238;H01L27/092;H01L29/78;(IPC1-7):H01L29/78;H01L21/823 主分类号 H01L21/768
代理机构 代理人
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