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发明名称
摘要
A method of fabricating CMOS devices with local interconnects is disclosed which is performed in two stages. In the first stage, a SALICIDE process is carried out, and in the second stage, the local interconnects are formed.
申请公布号
JP3249524(B2)
申请公布日期
2002.01.21
申请号
JP19940501111
申请日期
1993.06.09
申请人
发明人
分类号
H01L21/768;H01L21/8238;H01L27/092;H01L29/78;(IPC1-7):H01L29/78;H01L21/823
主分类号
H01L21/768
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