SAW DEVICE HAVING HERMETICALLY SEALED SAW CHIP AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A SAW(Surface Acoustic Wave) device having a hermetically sealed SAW chip and a fabricating method thereof are provided to miniaturize largely the SAW device by reducing a cavity as soon as possible. CONSTITUTION: A SAW device includes a piezoelectric substrate and a base substrate. Comb-like electrodes(13), first electrode pads(14) connected thereto, and a first film are formed on a first surface of the piezoelectric substrate(11A). The first film is located so as to surround the comb-like electrodes. Second electrode pads joined to the first pads and a second film joined to the first film are formed on a second surface of the base substrate(2A). The first and second films are joined by a surface activation process defining a cavity in which the comb-like electrodes and the first and second pads are hermetically sealed.