| 发明名称 |
Capacitor structure |
| 摘要 |
Structures including a capacitor dielectric material disposed on the surface of an electrode suitable for use in forming capacitors are disclosed. Methods of forming such structures are also disclosed.
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| 申请公布号 |
US7190016(B2) |
申请公布日期 |
2007.03.13 |
| 申请号 |
US20050243890 |
申请日期 |
2005.10.05 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
CAHALEN JOHN P.;RZEZNIK MARIA ANNA;SCHEMENAUR JOHN E.;HARIHARAN RAJAN |
| 分类号 |
H01L27/108;H01L29/76;H01L29/94;H01L31/119 |
主分类号 |
H01L27/108 |
| 代理机构 |
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