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发明名称
PRESSURE CONTROL DEVICE AND VACUUM PROCESSING SYSTEM
摘要
申请公布号
JPH0599360(A)
申请公布日期
1993.04.20
申请号
JP19910257889
申请日期
1991.10.04
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
KANZAKI NAOTO;MIYAKE AKIHIRO
分类号
F16K31/04;F16K51/02
主分类号
F16K31/04
代理机构
代理人
主权项
地址
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