STAGE DEVICE OF SUBSTRATE, INSPECTING DEVICE, AND CORRECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a stage device of a substrate capable of reducing damage, and an inspecting device using the same. SOLUTION: The stage device includes a stage 7 on which the substrate 6 is mounted and an up-and-down pin 21 placed at a position corresponding to a through-hole 11 formed at the stage 7 which is structured to be capable of rising and lowering to support the substrate 6 from below the substrate 6. A spout for jetting gas to the substrate 6 is formed at the tip of the pin 21. COPYRIGHT: (C)2007,JPO&INPIT