Device Processing System, Information Display Method, Program, and Recording Medium

摘要

A support device that is provided in a device manufacturing plant collects data from a device processing apparatus and analyzes the operating state and the like of the device processing apparatus based on the collected data. This support device consists of a data collection condition setting portion ( 231 ) that sets collection conditions of data to be used by the device processing apparatus; a statistical processing condition setting portion ( 232 ) that sets the processing condition of statistical processing to be performed on the collected data; and a graph display condition setting portion ( 233 ) that sets display conditions for displaying the collected data or the processing result of the statistical processing.