DEVICE FOR FORMING FILM IN VACUUM,申请号JP19920068280-传众专利搜索

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发明名称	DEVICE FOR FORMING FILM IN VACUUM
摘要
申请公布号	JPH05271931(A)	申请公布日期	1993.10.19
申请号	JP19920068280	申请日期	1992.03.26
申请人		发明人
分类号	C23C14/56;(IPC1-7):C23C14/56	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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