发明名称 |
Method of manufacturing a printed circuit board |
摘要 |
In a method of manufacturing a printed circuit board, a photoresist layer is formed on a three-dimensionally molded substrate through a conductive layer. A planar photomask which is provided with a mask pattern and a light-transmissive pattern is placed in front of the photoresist layer. A parallel light beam is radiated to the photomask in order to give to the photoresist layer an exposed pattern of an intended width "L" in correspondence to the light-transmissive pattern. In the present invention, the light-transmissive pattern is configured so as to satisfy the following relations: when D=0, W/L=1, when D>0, W/L<1, wherein "W" is a width of the light-transmissive pattern for forming the exposed pattern of the intended width "L", and "D" is a distance between the light-transmissive pattern and the photoresist layer. The photoresist layer of the exposed or an non-exposed pattern is removed to leave a patterned area of the conductive layer without the photoresist layer. A circuit pattern is formed on the substrate in accordance with the patterned area of the conductive layer. Since the light-transmissive pattern of the photomask is configured so as to reduce the influence of diffraction of the parallel light beam at the light-transmissive pattern, the circuit pattern can be precisely formed on the substrate.
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申请公布号 |
US5494780(A) |
申请公布日期 |
1996.02.27 |
申请号 |
US19940267942 |
申请日期 |
1994.07.06 |
申请人 |
MATSUSHITA ELECTRIC WORKS, LTD. |
发明人 |
NAKASHIMA, KUNJI;SUZUKI, TOSHIYUKI;NAKAMOTO, ATSUHIRO;TEZUKA, YOSHITAKA;OTANI, RYUJI |
分类号 |
G03F7/20;H05K1/00;H05K3/00;(IPC1-7):G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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