METHOD AND DEVICE FOR CAPACITIVE TEMPERATURE COMPENSATION AND DOUBLE-PLATE CAPACITIVE PRESSURE CONVERTER FOR ITS REALIZATION

摘要

FIELD: measurement technology, systems controlling technological processes. SUBSTANCE: converter 12 sensitive to signals of transducer 30 of pressure difference includes inseparable 28 and separable 26 modules. Inseparable module 28 is adopted for connection to analog separable module 26 having compensation capacitance MÇCäÇ or to digital separable module having compensation capacitance Cää.. Circuit for compensation of capacitance is incorporated into inseparable module 28 which includes compensation capacitance Cäî (124) chosen for provision of equality between MÇCäÇ and Cää while analog separable module 26 and digital separable module are calibrated. EFFECT: provision for transfer function of pressure more linearized and less responsive to changes of temperature. 21 cl, 4 dwgo