发明名称 MASK CASE, CARRYING DEVICE AND CARRYING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a mask case, a carrying device and a carrying method capable of accurately attaining the positioning of mask case in spite of a simple constitution in the case of carrying the mask case. SOLUTION: Since the shape of a recessed part 211 is like a pyramid and the shape of a recessed part 212 is like a V-groove, the mask case is positioned with respect to pins 31 by inserting two pins 31 in the recessed parts 211 and 212. Namely, just by placing the mask case at a place where the pins 31 are arranged, the mask case is positioned if the recessed parts 211 and 212 are provided on the base 210c of the mask case.
申请公布号 JPH11153855(A) 申请公布日期 1999.06.08
申请号 JP19980259363 申请日期 1998.08.28
申请人 NIKON CORP 发明人 HIRAKAWA SHINICHI;NAKAHARA KANEFUMI;ENDO YUTAKA
分类号 G03F1/66;H01L21/027 主分类号 G03F1/66
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