| 摘要 |
An apparatus for carrying in and out a substrate is provided for taking out the substrate from a tray or carrying the substrate onto the tray. The apparatus separates the stacked trays and permits a substrate supporting pin to enter into a space made by the separation. In the status where the substrate supporting pin is positioned under the tray to be carried in/out, the substrate supporting pin is inserted into a pin inserting hole of the tray to be carried in/out. At the time of taking out the substrate, the substrate is lifted from the tray by the substrate supporting pin so that the substrate can be taken out.
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