DEVICE FOR HIGH- FREQUENCY EXCITING AND MAINTENING OF LOW- TEMPERATURE PLASMA,申请号BG19870080749-传众专利搜索

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发明名称	DEVICE FOR HIGH- FREQUENCY EXCITING AND MAINTENING OF LOW- TEMPERATURE PLASMA
摘要
申请公布号	BG47640(A1)	申请公布日期	1990.08.15
申请号	BG19870080749	申请日期	1987.07.28
申请人	TEKHNOLOGICHEN KOMBINAT "MEKHATRONIKA"	发明人	SAPUNDZHIEV, LALAO D.;MARCHEV, MIKHAIL M.;VLAEVA, DANKA D.
分类号	H05H1/30;(IPC1-7):H05H1/30	主分类号	H05H1/30
代理机构		代理人
主权项
地址

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