首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
INNER CHAMBER WALL OF INDUCTIVE COUPLING PLASMA ETCHING EQUIPMENT
摘要
申请公布号
JPH10340894(A)
申请公布日期
1998.12.22
申请号
JP19970164976
申请日期
1997.06.06
申请人
TOKAI CARBON CO LTD
发明人
UEI TOSHIHARU
分类号
C01B31/02;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C01B31/02
代理机构
代理人
主权项
地址
您可能感兴趣的专利
PLANAR CONFORMAL CIRCUITS FOR DIAGNOSTICS
SYSTEM AND METHOD FOR OPTICAL DETECTION OF SKIN DISEASE
SEISMIC WAVEFIELD DEGHOSTING AND NOISE ATTENUATION
COMPONENT AND METHOD FOR PRODUCING A COMPONENT
Wafer mapping apparatus and load port including same
BATTERY-POWERED CORDLESS CLEANING SYSTEM
STEERING CONTROL DEVICE
CONTINGENT CARDIO-PROTECTION FOR EPILEPSY PATIENTS
INTELLIGENT SERVICE ASSISTANT - INSTRUMENT SIDE SOFTWARE CLIENT
CHARGING/DISCHARGING DEVICE
METHOD AND DEVICE FOR PRODUCING GROOVED BOLTS
IMPLANT COMPRISING OXIDIZED CELLULOSE AND METHOD FOR PREPARING SUCH AN IMPLANT
Microprocessor controlled prosthetic ankle system for footwear and terrain adaptation
METHOD FOR MONITORING THE STATE OF A PARTICULATE FILTER, EXHAUST SYSTEM AND MEASURING DEVICE
SYSTEMS AND METHODS FOR REGENERATION OF AQUEOUS ALKALINE SOLUTION
SELF-WRUNG FLAT PLATE MOP
APPARATUS AND METHOD FOR BIOLOGICAL SEWAGE TREATMENT
WOUND DRESSING APPARATUS AND METHOD OF USE THEREOF
AN ENVIRONMENTAL SENSOR AND A METHOD FOR DETERMINING RELATIVE VAPOUR PRESSURE
APPAREL WITH DISCREET POCKET
