摘要 |
PROBLEM TO BE SOLVED: To efficiently adjust the temperature of a tube itself that is made of fluororesin directly from around with a simple device without using any constant temperature water when accurately controlling the temperature of fluid with a strong erosion property for corroding a metal. SOLUTION: A Peltier element is glued and fixed to the surface of a heat exchange block 2 that exchanges heat with an erosive fluid, and the temperature of the above fluid is set to a target one by the operation control of the Peltier element via a heat exchange block. The above heat exchanger block in the precision fluid temperature adjustment device is constituted by a pair of heat transfer plates 11 that is made of a metal material with improved heat conductivity and joins each other. A heat exchanger for exchanging heat between the fluid and the heat exchange block is formed by pinching a tube 3 formed by fluororesin so that it is in close contact with a circular hole inner surface between semicircular grooves 12 being recessed on the junction surface of the heat transfer plate. |