发明名称 PRECISION FLUID TEMPERATURE-CONTROLLER
摘要 PROBLEM TO BE SOLVED: To efficiently adjust the temperature of a tube itself that is made of fluororesin directly from around with a simple device without using any constant temperature water when accurately controlling the temperature of fluid with a strong erosion property for corroding a metal. SOLUTION: A Peltier element is glued and fixed to the surface of a heat exchange block 2 that exchanges heat with an erosive fluid, and the temperature of the above fluid is set to a target one by the operation control of the Peltier element via a heat exchange block. The above heat exchanger block in the precision fluid temperature adjustment device is constituted by a pair of heat transfer plates 11 that is made of a metal material with improved heat conductivity and joins each other. A heat exchanger for exchanging heat between the fluid and the heat exchange block is formed by pinching a tube 3 formed by fluororesin so that it is in close contact with a circular hole inner surface between semicircular grooves 12 being recessed on the junction surface of the heat transfer plate.
申请公布号 JPH11201582(A) 申请公布日期 1999.07.30
申请号 JP19980017920 申请日期 1998.01.14
申请人 SMC CORP 发明人 MORITA HIDEO
分类号 F25B21/02;F25B47/00;F28F13/00;H01L35/30;H01L35/32;(IPC1-7):F25B21/02 主分类号 F25B21/02
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