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发明名称
Photosensitive composition, compound for use in the photosensitive composition and pattern forming method using the photosensitive composition
摘要
申请公布号
EP1688791(A3)
申请公布日期
2008.04.16
申请号
EP20060001603
申请日期
2006.01.26
申请人
FUJIFILM CORPORATION
发明人
WADA, KENJI
分类号
G03F7/004;G03F7/038;G03F7/039
主分类号
G03F7/004
代理机构
代理人
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地址
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