| 摘要 |
PURPOSE:To highly repeat a laser oscillation by generating an X-ray at a timing for positioning a preliminary ionization medium to be mainly discharged in a main discharge space before a main discharge is started. CONSTITUTION:When a preliminary ionization width 32 is 3cm, an X-ray generator 20 is connected to main discharge electrodes 14, 15 to generate a preliminary ionization X-ray 19 as shown in Fig. (a). Part of gas laser medium 33 preliminarily ionized by the X-ray 19 is moved in a main discharge space 18 as shown in Fig. (b) at the time of the next main discharge triggering. The generation of the X-ray is stopped at this time point. The ionized medium 33 exists in the space 18 as shown in Fig.(c) at the time of the next triggering after the triggering, and gas laser medium 32 in which main discharge is already finished, is moved by a distance corresponding to two discharge widths from the space 18. An X-ray is generated at this time point, and preliminary ionization is conducted. |
