MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19980030709-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH11233627(A)	申请公布日期	1999.08.27
申请号	JP19980030709	申请日期	1998.02.13
申请人	NEC CORP	发明人	YAMAZAKI YASUSHI
分类号	H01L21/28;H01L21/311;H01L21/3205;H01L21/3213;H01L21/768;H01L21/8242;H01L23/52;H01L23/522;H01L27/108;(IPC1-7):H01L21/768	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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