Optical inspection method and apparatus,申请号IL19960118872-传众专利搜索

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发明名称	Optical inspection method and apparatus
摘要
申请公布号	IL118872(A)	申请公布日期	2000.06.01
申请号	IL19960118872	申请日期	1996.07.16
申请人	ORBOT INSTRUMENTS LTD.	发明人	EMANUEL ELYASAF
分类号	G01N21/88;G01N21/956;G03F1/84;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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