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发明名称
藉由选择性侧壁聚合物沉积来控制光阻移除制程之关键尺寸微负载之方法
摘要
本发明是有关于在一制程系统中在一半导体基底上用于移除光阻特征之一方法。该方法利用一制程气体混合物,包括一碳氢化合物气体、一氧气(O2)与一惰性气体。因此,密集与疏松区域之关键尺寸(CD)的微负载可以被消除,并且光阻移除速率也可以被降低,以获得较好的关键尺寸控制。
申请公布号
TW200512792
申请公布日期
2005.04.01
申请号
TW093123186
申请日期
2004.08.03
申请人
应用材料股份有限公司
发明人
刘炜;梅世礼
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
詹铭文;萧锡清
主权项
地址
美国
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