| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To effectively reduce a carbon film deposited in a carrier holding a substrate when forming a carbon protective film on the substrate by a CVD method, to suppress generation of particles due to separation of a deposited layer, and to suppress discharge of out-gas generated from a carbon deposited layer on a carrier surface. <P>SOLUTION: In a method for manufacturing a magnetic recording medium by attaching a depositing substrate to the carrier for successively conveying it into a plurality of connected chambers and forming at least a magnetic film and a carbon protective film on the depositing substrate in the chamber, a process for removing by ashing the carbon protective film deposited and adhered to a carrier surface is provided after a process for removing the magnetic recording medium after film formation from the carrier and before a process for attaching the depositing substrate to the carrier. A process for forming the metal film on the carrier surface is provided before a process for attaching the depositing substrate to the carrier after a process for removing by ashing the carbon protective film deposited and adhered to the carrier surface. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
