发明名称 MEASUREMENT VALUE CORRECTING METHOD, MEASUREMENT VALUE CORRECTING PROGRAM, AND MEASURING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a measurement value correcting method, a measurement value correcting program, and a measuring device, capable of performing optimum correction tailored to the shape of the workpiece to be measured.SOLUTION: A measurement value correcting method for correcting the measurement value obtained by tracing a surface of a workpiece by a stylus comprises the steps of: preparing a plurality of workpieces manufactured from the same design data; obtaining a reference measurement value by measuring one of the plurality of workpieces as a master workpiece by a stylus (step S101); obtaining calibration data based on the difference between the reference measurement value and the design data (step S102); obtaining a target measurement value by measuring the workpieces other than the master workpiece among the plurality of workpieces as the workpiece to be measured by the stylus (step S103); and obtaining a corrected measurement value by correcting the target measurement value using the calibration data (step S104).SELECTED DRAWING: Figure 5
申请公布号 JP2016090478(A) 申请公布日期 2016.05.23
申请号 JP20140227235 申请日期 2014.11.07
申请人 MITSUTOYO CORP 发明人 GOTO TOMONORI
分类号 G01B5/20;G01B5/00 主分类号 G01B5/20
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