METHOD OF FORMING FLUORINATED CARBON FILM,申请号EP20040733935-传众专利搜索

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发明名称	METHOD OF FORMING FLUORINATED CARBON FILM
摘要
申请公布号	EP1626439(A4)	申请公布日期	2008.04.16
申请号	EP20040733935	申请日期	2004.05.19
申请人	OHMI, TADAHIRO;TOKYO ELECTRON LIMITED	发明人	OHMI, TADAHIRO;HIRAYAMA, MASAKI
分类号	H01L21/31;H01L21/314;C23C16/02;C23C16/26;H01L21/312;H01L21/316	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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