β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same

摘要

The β-ketoimine ligand is represented by the following formula 1:;
wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes the β-ketoimine ligand. A method of forming the β-ketoimine ligand and a method of forming a thin film using the metal complex compound including β-ketoimine ligand are provided.

主权项

1. A metal complex compound represented by the following Formula 3: wherein R1 and R2 are each independently a C1-C5 alkyl group, M represents a metal, and n is an integer ranging from 1 to 5.