Electro-optical device, electronic apparatus, and method for manufacturing electro-optical device

摘要

An electro-optical device includes an element substrate main body, a first capacitance electrode that is arranged above the element substrate main body, and has a first metal film and a second metal film which is stacked onto the first metal film, a first protective insulating film that is arranged so as to cover a side wall of the first metal film, and expose at least a portion of a side wall of the second metal film, a dielectric film that is arranged throughout the side wall of the second metal film which is exposed from the first protective insulating film, and over the second metal film, and a second capacitance electrode that is arranged throughout the dielectric film on the second metal film, and over the dielectric film which is arranged in the side wall of the second metal film exposed from the first protective insulating film.

主权项

1. An electro-optical device comprising:
a substrate; a lower capacitance electrode that is arranged above the substrate, and has a first metal film and a second metal film which is stacked onto the first metal film; a first protective insulating film that is arranged so as to cover a side wall of the first metal film, and expose at least a portion of a side wall of the second metal film; a dielectric film that is arranged throughout the side wall of the second metal film which is exposed from the first protective insulating film, and over the second metal film; and an upper capacitance electrode that is arranged throughout the dielectric film on the second metal film, and over the dielectric film which is arranged in the side wall of the second metal film exposed from the first protective insulating film.