发明名称 Arrays of vertically-oriented transistors, and memory arrays including vertically-oriented transistors
摘要 An array includes vertically-oriented transistors. The array includes rows of access lines and columns of data/sense lines. Individual of the rows include an access line interconnecting transistors in that row. Individual of the columns include a data/sense line interconnecting transistors in that column. The array includes a plurality of conductive lines which individually extend longitudinally parallel and laterally between immediately adjacent of the data/sense lines. Additional embodiments are disclosed.
申请公布号 US9478550(B2) 申请公布日期 2016.10.25
申请号 US201213595854 申请日期 2012.08.27
申请人 Micron Technology, Inc. 发明人 Karda Kamal M.;Surthi Shyam;Mueller Wolfgang;Tang Sanh D.
分类号 H01L27/105;H01L27/10;H01L27/108;H01L21/765 主分类号 H01L27/105
代理机构 Wells St. John, P.S. 代理人 Wells St. John, P.S.
主权项 1. An array comprising vertically-oriented transistors, the array comprising rows of access lines and columns of data/sense lines, the array comprising: individual of the rows comprising an access line interconnecting transistors in that row, the access lines comprising a gate of individual of the transistors, the individual transistors comprising a channel region, a gate dielectric being between the channel region and the gate of the individual transistors; individual of the columns comprising a data/sense line interconnecting transistors in that column; and a plurality of conductive lines, individual of the conductive lines extending longitudinally parallel and laterally between immediately adjacent of the data/sense lines, the individual conductive lines comprising four straight sides forming a four-major-sided polygon in a vertical cross-section, immediately adjacent of the straight sides joining in a single of four corner regions in the vertical cross-section, one of the four single corner regions being the sole elevationally outermost corner region of the respective individual conductive line in the vertical cross-section, another of the four single corner regions being opposite the one corner region in the vertical cross-section and being the sole elevationally innermost corner region of the respective individual conductive line in the vertical cross-section.
地址 Boise ID US