| 发明名称 |
Method for coating a workpiece |
| 摘要 |
In various embodiments, a method for coating a workpiece is provided. The method may include drying a workpiece, the workpiece being coated with at least one oxide layer as an uppermost layer; depositing a dielectric layer over the uppermost layer of the dried workpiece; wherein the workpiece is continuously subject to a pressure which is lower than atmospheric pressure during the drying process and during the depositing process. |
| 申请公布号 |
US9478409(B2) |
申请公布日期 |
2016.10.25 |
| 申请号 |
US201514594193 |
申请日期 |
2015.01.12 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
Steinbrenner Juergen;Kahn Markus;Schoenherr Helmut |
| 分类号 |
H01L21/31;H01L21/02;H01L21/302;C23C16/02;C23C16/40 |
主分类号 |
H01L21/31 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for coating a workpiece, the method comprising:
providing a workpiece coated with at least one oxide layer as an uppermost layer; drying the workpiece, wherein during the drying of the workpiece humidity incorporated in the oxide layer outgasses; after drying the workpiece, chucking the dried workpiece by a vacuum chuck; depositing a dielectric layer over the uppermost layer of the dried workpiece, wherein the dried workpiece is held in place with the vacuum chuck during the depositing process; wherein the workpiece is continuously subject to a pressure which is lower than atmospheric pressure during the drying process, during the chucking process, and during the depositing process. |
| 地址 |
Neubiberg DE |
