| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a workpiece cutting method capable of accurately cutting a workpiece. <P>SOLUTION: By irradiating the workpiece 1 with a laser beam with its condensing point adjusted thereto, a reform region is formed on the workpiece 1 along a reform region formation line 15 set in the inside at a predetermined distance from an outer edge E of the workpiece 1 along the outer edge, a cutting reform region is formed on the workpiece 1 along a cutting plan line 5, and the workpiece 1 is cut along the cutting plan line 5 by using the cutting reform region as a starting point. By forming the reform region on the workpiece 1 along the reform region formation line 15 set in the inside at the predetermined distance from the outer edge E of the workpiece 1 like that, a crack generated at the outer edge part 25 of the workpiece 1 is prevented from extending to the inside by the formed reform region or a crack extending from the reform region even when cutting stress is applied to the workpiece 1 in cutting the workpiece 1. <P>COPYRIGHT: (C)2009,JPO&INPIT |
