| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope capable of achieving low noise and high speed noise cancellation.SOLUTION: An electron microscope 1 includes an electron beam source 11 generating an electron beam, a noise detector 4 for detecting a part of an electron beam, and dividing a dividend by an electron beam detection signal, an image signal detector 6 for detecting a signal that can be obtained by irradiating a sample A with the electron beam, and an operation unit 60 for multiplying the output signal from the image signal detector 6 and the output signal from the noise detector 4.SELECTED DRAWING: Figure 1 |
