Plasma generator using spiral conductors

摘要

A plasma generator includes a pair of identical spiraled electrical conductors separated by dielectric material. Both spiraled conductors have inductance and capacitance wherein, in the presence of a time-varying electromagnetic field, the spiraled conductors resonate to generate a harmonic electromagnetic field response. The spiraled conductors lie in parallel planes and partially overlap one another in a direction perpendicular to the parallel planes. The geometric centers of the spiraled conductors define endpoints of a line that is non-perpendicular with respect to the parallel planes. A voltage source coupled across the spiraled conductors applies a voltage sufficient to generate a plasma in at least a portion of the dielectric material.

主权项

1. A plasma generator, comprising:
a first electrical conductor having first and second ends, said first electrical conductor shaped to form a first spiral between said first and second ends thereof, said first spiral lying in a first plane, said first spiral having a geometric center, said first electrical conductor so-shaped having inductance and capacitance wherein, in the presence of a time-varying electromagnetic field, said first electrical conductor so-shaped resonates to generate a harmonic electromagnetic field response; a second electrical conductor having first and second ends, said second electrical conductor shaped to form a second spiral between said first and second ends thereof, said second spiral being identical to said first spiral and lying in a second plane parallel to said first plane, said second spiral having a geometric center, said second electrical conductor so-shaped having inductance and capacitance wherein, in the presence of a time-varying electromagnetic field, said second electrical conductor so-shaped resonates to generate a harmonic electromagnetic field response; said first spiral and said second spiral partially overlapping one another in a direction perpendicular to said first plane and said second plane; said geometric center of said first spiral and said geometric center of said second spiral defining endpoints of a line, wherein said line is non-perpendicular with respect to said first plane and said second plane; dielectric material disposed between said first electrical conductor and said second electrical conductor; and a voltage source coupled across said first electrical conductor and said second electrical conductor for applying a voltage sufficient to generate a plasma in at least a portion of said dielectric material.