| 发明名称 |
TREATMENT METHOD TO MINIMIZE CORROSION OF LATERAL DIRECTION SPACER ON CONTACT REGION, AND SEMICONDUCTOR DEVICE |
| 摘要 |
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| 申请公布号 |
JPH09181181(A) |
申请公布日期 |
1997.07.11 |
| 申请号 |
JP19960343725 |
申请日期 |
1996.12.24 |
| 申请人 |
SAIPURESU SEMICONDUCTOR CORP |
发明人 |
JIEEMUSU II NARUTEI;KURISUTOFUA JIEI PETEI |
| 分类号 |
H01L21/28;H01L21/302;H01L21/3065;H01L21/311;H01L21/336;H01L21/60;H01L21/768;H01L21/8234;H01L23/522;H01L29/78;(IPC1-7):H01L21/768;H01L21/306 |
主分类号 |
H01L21/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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