System of measuring warpage and method of measuring warpage

摘要

Disclosed herein are a system of measuring a warpage and a method of measuring a warpage. The system of measuring a warpage of a sample by analyzing an image photographed by the camera using light that is diffused from a light source and reflected on a surface of a sample and is arrived at the camera through a reference grating part, the system includes: an intake part that removes a fume generated from the sample. By this configuration, it is possible to measure the warpage while effectively removing the fume generated from the sample according to the increase in the temperature of the sample at the time of measuring the warpage, thereby improving the accuracy of the warpage measurement.

主权项

1. A system of measuring a warpage, comprising:
a light source that irradiates light reflected from a surface of a sample of which the warpage is measured; a heating plate part having the sample disposed thereon and diffusing heat; a reference grating part that is spaced apart from the sample at a predetermined distance and transmits light reflected from the surface of the sample; a camera that acquires light transmitting the reference grating part to photograph an image; a server that analyzes the image photographed by the camera to calculate the warpage of the sample; and a control part provided with an intake part that removes a fume generated from the sample, wherein the reference grating part includes: a reference grating plate in which grids are formed on a transparent plate at a predetermined distance; a frame that fixes the reference grating plate; and at least one first suction hole that is mounted in the frame and is connected with the intake part by a first exhaust pipe.