Polarizing element, projector and method of manufacturing polarizing element

摘要

A polarizing element includes a transparent substrate, a reflective layer constituting, on the transparent substrate, grid-shaped convexities arrayed at a pitch smaller than a wavelength in a used optical bandwidth, a dielectric layer formed on the reflective layer, a diffusion barrier layer formed on the dielectric layer, and an absorbing layer formed on the diffusion barrier layer such that the diffusion barrier layer is sandwiched between the absorbing layer and the dielectric layer. This polarizing element has an excellent optical property and is able to prevent mixing of the absorbing layer and the dielectric layer under a high temperature.

主权项

1. A polarizing element comprising:
a transparent substrate; a reflective layer constituting, on the transparent substrate, grid-shaped convexities arrayed at a pitch smaller than a wavelength in a used optical bandwidth; a dielectric layer formed on the reflective layer; a diffusion barrier layer formed on the dielectric layer; and an absorbing layer formed on the diffusion barrier layer such that the diffusion barrier layer is sandwiched between the absorbing layer and the dielectric layer, wherein the diffusion barrier layer is formed of a material selected from the group consisting of Ta, W, Nb and Ti.