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经营范围
发明名称
METHOD AND APPARATUS FOR INSPECTING PARTICLE
摘要
申请公布号
JPH08105841(A)
申请公布日期
1996.04.23
申请号
JP19940242889
申请日期
1994.10.06
申请人
FUJITSU LTD
发明人
KOMADA HIROZANE
分类号
G01N21/88;G01N21/93;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/88
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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