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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11233656(A)
申请公布日期
1999.08.27
申请号
JP19980036000
申请日期
1998.02.18
申请人
TOSHIBA CORP
发明人
KAWAI HIROBUMI
分类号
H01L21/8249;H01L21/8222;H01L21/8248;H01L27/06;(IPC1-7):H01L21/824;H01L21/822
主分类号
H01L21/8249
代理机构
代理人
主权项
地址
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