Twisted array design for high speed vertical channel 3D NAND memory

摘要

Roughly described, a memory device has a multilevel stack of conductive layers. Vertically oriented pillars each include series-connected memory cells at cross-points between the pillars and the conductive layers. SSLs run above the conductive layers, each intersection of a pillar and an SSL defining a respective select gate of the pillar. Bit lines run above the SSLs. The pillars are arranged on a regular grid which is rotated relative to the bit lines. The grid may have a square, rectangle or diamond-shaped unit cell, and may be rotated relative to the bit lines by an angle θ where tan(θ)=±X/Y, where X and Y are co-prime integers. The SSLs may be made wide enough so as to intersect two pillars on one side of the unit cell, or all pillars of the cell, or sufficiently wide as to intersect pillars in two or more non-adjacent cells.

主权项

1. A memory device on a substrate, comprising:
a multilevel stack of conductive layers, each of the layers being oriented parallel to the substrate; a plurality of pillars oriented orthogonally to the substrate, each of the pillars comprising a plurality of series-connected memory cells located at cross-points between the pillars and the conductive layers; a plurality of string select lines oriented parallel to the substrate and above the conductive layers, each of the string select lines intersecting a respective distinct subset of the pillars, each of the intersections of a pillar and a string select line defining a respective select gate of the pillar; and a plurality of parallel bit line conductors in a layer parallel to the substrate and above the string select lines, each of the bit line conductors superposing a respective distinct subset of the pillars, each of the pillars underlying one of the bit line conductors, wherein the pillars in the plurality of pillars are arranged on a regular grid having two perpendicular lateral dimensions, neither of the dimensions being parallel to or orthogonal to the bit line conductors.