| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for inspecting a modified pattern of a liquid-repellent resin in the liquid-repellent resin modified to become lyophilic in a predetermined pattern by ultraviolet irradiation, non-destructively and without losing the liquid-repellent and lyophilic properties.SOLUTION: In a method and a device for inspecting a modified pattern of a liquid-repellent resin, an inspected region set on a surface of a liquid-repellent resin as an inspection target is irradiated with visible light, and fluorescence light emitted from the inspected region is detected. The surface of the liquid-repellent resin as the inspection target is irradiated with ultraviolet light of a predetermined pattern and modified by energy absorption of the ultraviolet light to change the property thereof from liquid-repellent to lyophilic. Then, inspection is performed to check whether the lyophilic pattern is formed or not, on the basis of a difference in the amount of fluorescence emission between a portion on the surface of the liquid-repellent resin keeping the liquid repellency and a portion changed to lyophilic. |
