| 摘要 |
PCT No. PCT/EP92/02549 Sec. 371 Date Apr. 28, 1994 Sec. 102(e) Date Apr. 28, 1994 PCT Filed Oct. 30, 1992 PCT Pub. No. WO93/09261 PCT Pub. Date May 13, 1993A work surface, e.g. an integrated circuit, is treated with a plasma jet. The work surface is shielded from an ambient medium by a shielding gas jet directed to create a shielded zone around the work surface, or which is blown over the work surface so it intersects the plasma jet on the work surface.
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