发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device, using a highly reliable TFT structure. SOLUTION: A CMOS circuit formed on a substrate 101 is provided with a sub-gate wiring (first wiring) 102a and a main gate wiring (second gate wiring) 107a on an N-channel TFT. An LDD region 113 overlaps on the first wiring 102a and does not overlap on the second wiring 107a. When a gate voltage is applied to the first wiring, a GOLD structure is obtained and turns into LDD structure, if voltage is not applied. GOLD structure and LDD structure can separately be used according to circuit specifications.</p>
申请公布号 JP2000183356(A) 申请公布日期 2000.06.30
申请号 JP19980361689 申请日期 1998.12.18
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 OTANI HISASHI;YAMAZAKI SHUNPEI;KOYAMA JUN;ARAI YASUYUKI
分类号 H01L29/786;G02F1/136;G02F1/1362;G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/12;(IPC1-7):H01L29/786 主分类号 H01L29/786
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