发明名称 |
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor device, using a highly reliable TFT structure. SOLUTION: A CMOS circuit formed on a substrate 101 is provided with a sub-gate wiring (first wiring) 102a and a main gate wiring (second gate wiring) 107a on an N-channel TFT. An LDD region 113 overlaps on the first wiring 102a and does not overlap on the second wiring 107a. When a gate voltage is applied to the first wiring, a GOLD structure is obtained and turns into LDD structure, if voltage is not applied. GOLD structure and LDD structure can separately be used according to circuit specifications.</p> |
申请公布号 |
JP2000183356(A) |
申请公布日期 |
2000.06.30 |
申请号 |
JP19980361689 |
申请日期 |
1998.12.18 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
OTANI HISASHI;YAMAZAKI SHUNPEI;KOYAMA JUN;ARAI YASUYUKI |
分类号 |
H01L29/786;G02F1/136;G02F1/1362;G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/12;(IPC1-7):H01L29/786 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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