发明名称 CANTILEVERED MICROSTRUCTURE METHODS AND APPARATUS
摘要 Methods for directing an optical beam and for making an apparatus for directing an optical beam are described. One such method may include applying a first force to a plate to move the plate from a first angular orientation to a second angular orientation wherein the plate contacts a stop in the second angular orientation. A second force can be applied between the plate and the stop to hold the plate against the stop in a plane substantially parallel to a substantially planar surface of the stop. An apparatus for directing an optical beam may be made by coupling an array of plates to a base assembly wherein each plate is movable between a first angular orientation and a second angular orientation. An array of apertures may be formed in a stop assembly wherein the stop assembly is coupled to the base assembly and each aperture is positioned to contact its respective plate when the plate is in a second angular orientation.
申请公布号 EP1166163(A2) 申请公布日期 2002.01.02
申请号 EP20000946745 申请日期 2000.03.02
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 BEHIN, BEHRANG;LAU, KAM, Y.;MULLER, RICHARD, S.
分类号 B81B3/00;G02B6/35;G02B26/08 主分类号 B81B3/00
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