| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystal-pulling device and process enabling stable, continuous pulling of crystals by endless belts without any troublesome manual work. SOLUTION: In a crystal-pulling device, semiconductor crystal bands 15 are continuously pulled from a crucible by endless belts 20a and 20b. The device is equipped with a position-control unit 23 which automatically adjusts the position in the width direction of the crystal 15 in the crystal-pulling pathway. This position-control unit 23 is equipped with a pair of block bodies 25 which are located on both sides in the width direction of the crystal and movable in the width direction. Each block body is equipped with a position sensor 26 which detects the edge of the crystal and a sliding contact part 27 which contacts the edge of the crystal and adjusts its position in the width direction. |
